Vibration control for sensitive equipment

Measuring kit for highly sensitive measuring devices

item number: VMSet-25

Highly sensitive measuring equipment, such as scanning tunneling microscopes, must have the highest resolution and accuracy. They rely on a very low vibration level at their place of installation. In order to check this property of the installation site, vibrations must be reliably measured and verified.

Our complete system for sensitive equipment is equipped with a high-sensitivity sensor and can thus make even the smallest vibrations visible.

Frequent applications of this measuring kit are:

Semiconductor industry equipment (lithography)
Scanning Tunneling Microscopes / Electron Microscopes
Mass spectrometers
High-resolution microscopes
UHV systems
Medical imaging technology (e.g. MRI)

Anwendungsbeispiele - Einsatzberichte:

Measuring in according to guideline VDI2038

Extract from the InnoPlotter Pro software

Extract from the InnoAnalyzer Pro software

The VMSet-25 measuring cases record micro-vibrations on sensitive systems and machines with the highest precision. The measuring chain consists of specialised, very low-noise components. Standard-compliant measurements of VC and nano lines according to VDI 2038 Part 2 are already available in the evaluation software. Of course, free measurements can also be carried out and acoustic quantities analysed. The complete systems can be used for one or more measuring points.

Country of origin:	Germany
Customs tariff number:	90318080
Weight:	VMSet-25-1: 6,4 kg VMSet-25-2: 6,8 kg VMSet-25-6: 11,7 kg

Measurement of Micro Vibration -1 channel - (VMSet-25-1)

1x InnoBeamer LX2 incl. USB cable + 1x Sync-Cable
1x VibroMatrix-CD incl. documentation
1x Accelerometer KB12VD
1x Sensor cable i107-5 (16.4ft)
1x Tripod Measuring Plate
1x Software licence InnoPlotter Pro software
1x Software licence InnoAnalyzer Octave Pro software
1x Software licence Free Replay
1x Case for VibroMatrix measuring system

Measurement of Micro Vibration -2 channel - (VMSet-25-2)

1x InnoBeamer LX2 incl. USB cable + 1x Sync-Cable
1x VibroMatrix-CD incl. documentation
2x Accelerometer KB12VD
2x Sensor cable i107-5 (16.4ft)
1x Tripod Measuring Plate
1x Triaxial Mounting Cube M10
1x Case for VibroMatrix measuring system
1x Software licence InnoPlotter Pro software for 2 measurement channels
1x Software licence InnoAnalyzer Octave Pro software for 2 measurement channels
1x Software licence Free Replay

Computer-based measuring system for precise measurement of micro-vibrations
Extremely low-noise accelerometer and measuring amplifier
Including base plate for levelling the sensors
InnoPlotter Pro: record vibration characteristics over time
InnoAnalyzer Octave: display vibrations on octave bands / thirds
Raw data recording possible to analyse signals in detail at a later time

Mobile measuring case VMSet-25 - Vibration-sensitive devices/buildings

Monitor highly sensitive devices and measuring equipment
The highly sensitive sensor registers the smallest vibrations
Display of signals in VibroMatrix in HD quality
Measurement according to VC/nano lines
Measurement of seismic vibrations

Data sheet Measuring Kit: Micro vibrations

+49 (3901) 305 99 50

Do you have any questions about our products or services? Call us now and we will be happy to help you. We would also be happy to arrange an on-site appointment.