Vibration control for sensitive equipment

Measuring kit for highly sensitive measuring devices

item number: VMSet-25

Highly sensitive measuring equipment, such as scanning tunneling microscopes, must have the highest resolution and accuracy. They rely on a very low vibration level at their place of installation. In order to check this property of the installation site, vibrations must be reliably measured and verified.

Our complete system for sensitive equipment is equipped with a high-sensitivity sensor and can thus make even the smallest vibrations visible.

Frequent applications of this measuring kit are:

  • Semiconductor industry equipment (lithography)
  • Scanning Tunneling Microscopes / Electron Microscopes
  • Mass spectrometers
  • High-resolution microscopes
  • UHV systems
  • Medical imaging technology (e.g. MRI)

 

 

The VMSet-25 measuring cases record micro-vibrations on sensitive systems and machines with the highest precision. The measuring chain consists of specialised, very low-noise components. Standard-compliant measurements of VC and nano lines according to VDI 2038 Part 2 are already available in the evaluation software. Of course, free measurements can also be carried out and acoustic quantities analysed.  The complete systems can be used for one or more measuring points.

Country of origin: Germany
Customs tariff number: 90318080
Weight: VMSet-25-1: 6,4 kg
VMSet-25-2: 6,8 kg
VMSet-25-6: 11,7 kg


Measurement of Micro Vibration -1 channel - (VMSet-25-1)

  • 1x InnoBeamer LX2 incl. USB cable + 1x Sync-Cable
  • 1x VibroMatrix-CD incl. documentation
  • 1x Accelerometer KB12VD
  • 1x Sensor cable i107-5 (16.4ft)
  • 1x Tripod Measuring Plate
  • 1x InnoPlotter Pro software
  • 1x InnoAnalyzer Octave Pro software
  • 1x Case for VibroMatrix measuring system

Measurement of Micro Vibration -2 channel - (VMSet-25-2)

  • 1x InnoBeamer LX2 incl. USB cable + 1x Sync-Cable
  • 1x VibroMatrix-CD incl. documentation
  • 2x Accelerometer KB12VD
  • 2x Sensor cable i107-5 (16.4ft)
  • 1x Tripod Measuring Plate
  • 1x Triaxial Mounting Cube M10
  • 1x Case for VibroMatrix measuring system
  • 1x InnoPlotter Pro software for 2 measurement channels
  • 1x InnoAnalyzer Octave Pro software for 2 measurement channels

 

  • Computer-based measuring system for precise measurement of micro-vibrations
  • Extremely low-noise accelerometer and measuring amplifier
  • Including base plate for levelling the sensors
  • InnoPlotter Pro: record vibration characteristics over time
  • InnoAnalyzer Octave: display vibrations on octave bands / thirds
  • Raw data recording possible to analyse signals in detail at a later time


Mobile measuring case VMSet-25 - Vibration-sensitive devices/buildings 

  • Monitor highly sensitive devices and measuring equipment
  • The highly sensitive sensor registers the smallest vibrations
  • Display of signals in VibroMatrix in HD quality
  • Measurement according to VC/nano lines
  • Measurement of seismic vibrations


Do you have any questions about our products or services? Call us now and we will be happy to help you. We would also be happy to arrange an on-site appointment.

  • Vibration diagnosis Service
  • Troubleshootings
  • Balancing
  • Training sessions
  • Calibration

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